What is Megcon CO2 bubbler?
The Antistatic System for Ultrapure Water (MEGCON)
"MEGCON Ⅱ+" is the equipment that controls the resistivity value of ultrapure water
by dissolving carbon dioxide gas in ultrapure water through special hollow-fiber membrane.
Overview
In the precision cleaning of semiconductor products, ultrapure water is used that is almost free of ion component.
Therefore, static electricity can easily generate and the following errors cause product defect.
1.Destruction of substrate circuit (ESD damage)
2.Particle reattachment
With MEGCONⅡ+, by reducing the resistivity value of ultrapure water and giving it conductivity,
it is possible to prevent defects caused by this static electricity.
Applications
1.Dicing process
2.High Pressure jet cleaning
3.Scrubber cleaning
4.Liquid crystal process
5.Mask and reticle cleaning
Features
Low risk of particle contamination and small amount of CO2 gas consumption
Possible to control even in the case of small flow rate
Low pressure loss
Automatic control of resistivity value
Line-up large flow rate models
Principle
Control the resistivity value of ultrapure water by dissolving carbon dioxide gas in ultrapure water through special hollow-fiber membrane.